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A User's Guide to Vacuum Technology, by John F. O'Hanlon
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In the decade and a half since the publication of the Second Edition of A User?s Guide to Vacuum Technology there have been many important advances in the field, including spinning rotor gauges, dry mechanical pumps, magnetically levitated turbo pumps, and ultraclean system designs. These, along with improved cleaning and assembly techniques have made contamination-free manufacturing a reality. Designed to bridge the gap in both knowledge and training between designers and end users of vacuum equipment, the Third Edition offers a practical perspective on today?s vacuum technology. With a focus on the operation, understanding, and selection of equipment for industrial processes used in semiconductor, optics, packaging, and related coating technologies, A User?s Guide to Vacuum Technology, Third Edition provides a detailed treatment of this important field. While emphasizing the fundamentals and touching on significant topics not adequately covered elsewhere, the text avoids topics not relevant to the typical user.
- Sales Rank: #943803 in Books
- Published on: 2003-07-04
- Original language: English
- Number of items: 1
- Dimensions: 9.50" h x 1.22" w x 6.40" l, 1.91 pounds
- Binding: Hardcover
- 536 pages
Review
"...an excellent handbook for engineers, scientists, or anybody who uses vacuum systems on a regular basis." (IEEE Circuits & Devices Magazine, May/June 2005)
"...clearly written with...many helpful hints...highly recommended." (MRS Bulletin, January 2005)
"This book sucks in a good way…the third edition will never get dusty on my bookshelf…although the text is certainly not coffee-table reading material, it will have a wide appeal…it is particularly valuable as a reference for those who work practically with vacuum technologies and a must-buy for those who design them." (JOM, February 26, 2004)
"...a fundamental understanding of modern vacuum technology and a practical user's perspective of laboratory and industrial vacuum technology. This edition, while still providing core information in a very practical style...covers many new advances in the field...there are loads of graphs, data, and tables to provide practical and useful information to the vacuum user." (IEEE Electrical Insulation Magazine)
From the Publisher
An introduction to the theory and practice of modern vacuum technology, with applications. Focuses on the understanding, operation, and selection of equipment for vacuum processes used in semiconductor, optical, and related technologies. This 2nd Edition has new information on components, lubrication, pump fluids, and other materials. Basic characteristics and operational procedures are given for each high-vacuum pumping system.
From the Back Cover
The leading text in the field–fully updated to reflect changes in vacuum technology
In the decade and a half since the publication of the Second Edition of A User’s Guide to Vacuum Technology there have been many important advances in the field, including spinning rotor gauges, dry mechanical pumps, magnetically levitated turbo pumps, and ultraclean system designs. These, along with improved cleaning and assembly techniques have made contamination-free manufacturing a reality. Designed to bridge the gap in both knowledge and training between designers and end users of vacuum equipment, the Third Edition offers a practical perspective on today’s vacuum technology. With a focus on the operation, understanding, and selection of equipment for industrial processes used in semiconductor, optics, packaging, and related coating technologies, A User’s Guide to Vacuum Technology, Third Edition provides a detailed treatment of this important field. While emphasizing the fundamentals and touching on significant topics not adequately covered elsewhere, the text avoids topics not relevant to the typical user.
The Third Edition features significant additions, including:
- Updated coverage of all topics
- A discussion of SI units and their conversion
- Expanded coverage of gauges, pumps, materials, components, and systems
- A discussion of ultraclean vacuum systems–now used routinely in high-volume production of semiconductor chips and related process-sensitive devices
- A review of rough pumping and crossover, including methods for prevention of aerosol formation
As with previous editions, the Third Edition is an important resource for both students and professionals in microelectronics, optics, thin-film coating, and other industries dependent on leading-edge applications of vacuum technology.
Most helpful customer reviews
0 of 0 people found the following review helpful.
It won't blow you away
By Ted Slack
One might say that this book sucks... that's a good thing.
4 of 4 people found the following review helpful.
everyone in semiconductor industrie must read this book
By Andreas Berthe
Since I work in a very big semi' fab as field service engineer I looking for a good description of any tool part's on several manufacturing machines. But i work in Germany and it isn't so easy to find much more and better information as for an student without experience. It is my second book about vakuum technologie, all new kinds of engineering and also standard technologie is well prepaired in this issue. Some description of Pump's could be better or more funktionplan's , but all in one book is maybe too much. I was very surprised of this universal Handbook for engineer's and technician, best offer for all who need information about PVD, CVD, Implant vakuum etc. A lot of basic's in introduction part, well to understand, intresting gas properties, cluster technologie and last but not least - a big appendix with all what you need , very fine. Thank's for this good book.
6 of 7 people found the following review helpful.
Execellent, practical and comprehensive reference book.
By A Customer
I borrowed this book from a colleague here at Applied Materials. After looking at it for a few minutes, I offered to buy it from him. Of course, he refused. So here I am at Amazon (physically at work) to purchase the book. It is extremely practical and I intend to keep it here at work as a reference for problems I encounter. By the way, my web address is [...] Please feel free to visit or email me
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